SEMPrep2

SEMPrep2
Ion etchers are used to produce polished surfaces – for example for EBSD – and also as a tool for cutting into the depth of a sample and opening up a cross-sectional area. An optical microscope is used to position the sample and define the area to be processed. Technoorg's systems have two argon ion emitters with high and low energy ranges: while high energies remove material quickly, the low energy range is suitable for polishing a surface.
The removal rates are on silicon in the range of 150 µm per hour. With the ultra-high ion source, ablation rates up to 550 µm/h are possible.
We would be pleased to introduce the system to you during a visit on your site or we can show you our demo unit in the laboratory, where we have the possibility to take SEM images on a field emission unit right on the spot.
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Contact person
Phone: +41 44 940 99 55

Christoph Mareischen
christoph.mareischen@gloorinstruments.ch