XUUS EUV

Ultrafast Tabletop EUV Light Source

The KMLabs’ XUUS is a coherent eXtreme Ultraviolet Ultrafast Source that is driven by an intense ultrafast laser system such as the KMLabs’ RAEA.

The XUUS upconverts the driving laser near-IR pulses into the Extreme UV (EUV or XUV) region of the spectrum. By employing KMLabs' patented hollow waveguide, the output EUV high harmonic generation (HHG) beam is bright, coherent and ultrastable — enabling challenging applications.

Depending on the noble gas used, the EUV wavelengths can be tuned from ~10 to 60 nm. Custom systems can achieve wavelengths as short as 6 nm upon request.

The newest XUUS 5 is designed for flexibility: it is optimized for both 30 nm and 13 nm, it can be driven by different laser wavelengths and lasers.

The EUV output is delivered to the experimental end-station under high vacuum via KMLabs’ beamline modules. To learn more about the variety of our beamline modules, check out Arterium suite.